BILTHOVEN, The Netherlands and MILPITAS, Calif., Nov. 17, 2003 (PRIMEZONE) -- NuTool, Inc., a privately funded, closely held semiconductor technology company and ASM International N.V. (Nasdaq:ASMI) (Euronext Stock Exchange in Amsterdam:ASM), a global company providing semiconductor equipment and materials for semiconductor manufacturing, today announced that they will jointly present the latest results on Copper/Low-k damascene integration at the NuTool sponsored seminar to be held on December 4 during Semicon Japan.
"We're pleased with our ongoing collaboration with ASM International to develop, optimize and integrate the critical processing steps for the sub-90 nanometer Copper and Low-k technologies," stated Homayoun Talieh, CEO and founder of NuTool. "This is the second joint technical seminar that we will be holding together and it reflects the successful outcome of the ongoing technical collaboration to provide enabling and unique technologies to our customers."
Fukumi Tomino, President of ASM Japan and Vice President of Asia Operations/ASM International said, "There are many technical challenges for multi-level Copper/Low-k interconnect integration. ASM's Aurora(R) Low-k dielectrics in combination with NuTool's revolutionary Copper Electrochemical Mechanical Deposition (ECMD(TM)) and Reverse-Linear Chemical Mechanical Polishing (RL-CMP(TM)) technologies have delivered excellent integration results. Furthermore, integration with our ALCVD(TM) barrier and seed materials holds great promise for the 65 and 45 nanometer nodes."
The seminars will be held in the Sumire Room at the Hotel New Otani Makuhari (2-2 Hibino, Mihama-ku, Chiba-City, Chiba) from 13:15 to 16:15 on December 4, 2003. The seminar speakers will be Dr. Gerald Marcyk, Senior Technical Advisor and Member of the Board of Directors at NuTool, Dr. Rajeev Bajaj, Senior Director of CMP at NuTool and Dr. Devendra Kumar, Director of BEOL Technology at ASM International. For registration information, please visit www.nutool.com.
About NuTool
NuTool, Inc., designs, manufactures and markets innovative Cu Damascene process technologies and equipment to the semiconductor industry. Headquartered in Milpitas, Calif., with sales and service offices throughout the United States, Europe and Asia Pacific through a partnership with Tokyo Electron. Additional information about NuTool is available at www.nutool.com.
About ASM
ASM International N.V. is headquartered in Bilthoven, the Netherlands. ASM International is a global company, serving one of the most important and demanding industries in the world. The Company possesses a strong technological base, state-of-the-art manufacturing facilities, a competent and qualified workforce and a highly trained, strategically distributed support network. ASM International's subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing, assembly and packaging through their facilities in the United States, Europe, Japan and Asia. ASM International's common stock shares trade on Nasdaq (symbol ASMI) and the Euronext Stock Exchange in Amsterdam (symbol ASM). For more information, visit ASM's web site at http://www.asm.com
NuTool is a registered trademark of NuTool, Inc. Lumina, RL-CMP, and ECMD are trademarks of NuTool, Inc. ASM and Aurora are registered trademarks and ALCVD is a trademark of ASM International N.V.