BILTHOVEN, The Netherlands, May 27, 2004 (PRIMEZONE) -- ASM (Nasdaq: ASMI and Euronext Amsterdam: ASM) today that it has been selected by the major Japanese consumer electronics manufacturer for critical process equipment at the customer's new 300 mm/90 nanometer production facility. Deliveries of ASM's Eagle(R)-12 Single-Wafer Plasma Enhanced CVD and Levitor(R) 4300 Rapid Thermal Processing systems are scheduled to begin in the fourth quarter of 2004.
In making the announcement, Arthur del Prado, President and CEO of ASM International, commented, "This double win is extremely noteworthy because it showcases two ASM cutting edge technology products: our Eagle-12 PECVD tool that will be used for multiple process applications, including low-k dielectrics using our Aurora(R) low-k film; and, our revolutionary Levitor RTP system, with its unique high and low temperature applications."
The Eagle12 single-wafer plasma-enhanced CVD system has three chambers configured for enhanced productivity. It is part of the Eagle family whose systems are most often utilized for depositing insulators, such as silicon oxide, silicon nitride, and low-k dielectric films used in interconnect circuits. The simplicity of these systems results in low cost, high reliability and low maintenance.
The Aurora low-k dielectric material is applied by ASM's Eagle platforms. Based on customer evaluations, Aurora is thought to be the hardest "carbon doped oxide" low-k material available for production and thus provides the greatest resistance to pressure from the CMP process. Aurora is fully scalable to lower k values, so that the basic material can be used over many technology generations.
The Levitor RTP system employs a breakthrough floating wafer principle, where a wafer, confined between two massive hot blocks, is heated through conduction. The gas layer between the wafer surface and reactor blocks self-centers the wafer and keeps it floating without any support. The 0.15 mm thick gas enables uniform, ultra fast heating with rates up to 900 degrees C/s.
About ASM
ASM International N.V. headquartered in Bilthoven, the Netherlands, is a global company servicing one of the most important and demanding industries in the world. The Company possesses a strong technology base, state-of-the-art manufacturing facilities, a competent and qualified workforce and a highly trained, strategically distributed support network. ASM International and its subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing (Front-end segment) as well as assembly and packaging (Back-end segment) through facilities in the United States, Europe, Japan and Asia. ASM International's common stock trades on Nasdaq (symbol ASMI) and the Euronext Amsterdam Stock Exchange (symbol ASM). For more information, visit ASMI's website at http://www.asm.com.
Safe Harbor Statement under the U.S. Private Securities Litigation Reform Act of 1995: All matters discussed in this statement, except for any historical data, are forward-looking statements. Forward-looking statements involve risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements. These include, but are not limited to, economic conditions and trends in the semiconductor industry, currency fluctuations, the timing of significant orders, market acceptance of new products, competitive factors, litigation involving intellectual property, shareholder and other issues, commercial and economic disruption due to terrorist activity, armed conflict or political instability and other risks indicated in the Company's filings from time to time with the U.S. Securities and Exchange Authorities.
ASM, Aurora, Eagle, and Levitor are registered trademarks of ASM International N.V. http://hugin.info/132090/R/947212/133641.pdf