ASM introduces enhanced low temperature performance in its 300mm Epsilon line of epitaxial production reactors


BILTHOVEN, The Netherlands, July 12, 2004 (PRIMEZONE) -- ASM International N.V. (Nasdaq:ASMI) (Euronext Amsterdam: ASM) announced today throughput improvements in its Epsilon(R) series of 300mm epitaxial production reactors. Initial shipments reached customers early in 2004. The new E3200 model is backward compatible with all processes, and it demonstrates up to 25% throughput improvement for certain advanced, low temperature epitaxial processes, including CMOS device elevated source drain and strained silicon applications.

Dr. Armand P. Ferro, ASM Business Unit Manager for Epitaxial Products, commented: "ASM has been committed to continually improving its Epsilon Line of production reactors since their introduction. The recent CMOS industry adoption of 300mm wafers and advanced low temperature epitaxial processes accelerates the need for production improvements. The through-put enhancement capability was implemented and qualified by multiple customers demanding the most advanced low temperature production processes."

ASM's Epsilon line of single wafer production epitaxial reactors are used and preferred in nearly all segments of the silicon device manufacturing industry where advanced epitaxial process capability brings performance advantages to device design. The unique Epsilon epitaxial process chamber has unprecedented flexibility deriving from its basic simplicity of design. The Epsilon's wide range of process capability is especially useful at low temperatures needed in the advanced CMOS applications of the ITRS Roadmap.

About ASM

ASM International N.V. headquartered in Bilthoven, the Netherlands, is a global company servicing one of the most important and demanding industries in the world. The Company possesses a strong technology base, state-of-the-art manufacturing facilities, a competent and qualified workforce and a highly trained, strategically distributed support network. ASM International and its subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing (Front-end segment) as well as assembly and packaging (Back-end segment) through facilities in the United States, Europe, Japan and Asia. ASM International's common stock trades on NASDAQ (symbol ASMI) and the Euronext Amsterdam Stock Exchange (symbol ASM). For more information, visit ASMI's website at www.asm.com .

Safe Harbor Statement under the U.S. Private Securities Litigation Reform Act of 1995: All matters discussed in this statement, except for any historical data, are forward-looking statements. Forward-looking statements involve risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements. These include, but are not limited to, economic conditions and trends in the semiconductor industry, currency fluctuations, the timing of significant orders, market acceptance of new products, competitive factors, litigation involving intellectual property, shareholder and other issues, commercial and economic disruption due to terrorist activity, armed conflict or political instability and other risks indicated in the Company's filings from time to time with the U.S. Securities and Exchange Authorities.

ASM and Epsilon are registered trademarks of ASM International N.V.



            

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