ATMI Introduces Enhanced Copper Electrochemical Deposition Process


DANBURY, Conn., July 10, 2006 (PRIMEZONE) -- ATMI, Inc. (Nasdaq:ATMI), a supplier of specialty materials and high-purity materials handling and delivery solutions to the world's leading semiconductor manufacturers, today introduced a new copper electrochemical deposition process for producing semiconductor chips with advanced copper interconnects in partnership with Enthone, Inc., a division of Cookson Group, PLC, and Novellus Systems. The new chemistry and process were developed for Novellus Systems' SABRE tool, providing a turnkey solution for 45 nanometer (nm) technology and below.

ATMI-Enthone's Viaform Extreme(tm) process offers significant enhancements that meet stringent performance requirements for low defect rates, uniformity, and electrical performance for the 45nm technology node and below. The performance advantage of Viaform Extreme to create copper films of high reliability has been validated at leading semiconductor manufacturers.

"The pace and agility of this development is an outstanding example of the cooperation and collaboration between ATMI, Enthone, and Novellus technology teams," said Mike Besnard, ATMI Materials Director of Marketing. "Our ability to move quickly helps our customers in today's dynamic market. This process enables success for our customers' latest technology development requirements while improving cost of ownership, yield enhancement, and productivity."

"This combined solution demonstrates our ability to address limitations commonly associated with existing technology," said Ted Cacouris, Director of Technology for Novellus Systems. "We have begun to see positive reactions from our customers regarding the benefits of this solution and its flexibility in meeting company-specific requirements."

"Viaform Extreme is the product of another successful collaboration with Novellus Systems, with the end result being a process that combines Novellus Sabre Extreme(tm) system with Viaform chemistry enhancements for 45nm and 32nm that provide value to customers through leading technology and enhanced productivity," said Richard Hurtubise, Global Product Line Manager for Enthone.

ATMI provides specialty materials and materials packaging to the worldwide semiconductor industry. As the Source of Semiconductor Process Efficiency, ATMI helps customers improve wafer yields and lower operating costs. For more information, please visit atmi.com.

Statements contained herein that relate to ATMI's future performance, including, without limitation, statements with respect to ATMI's anticipated results of operations or level of business for 2006 or any other future period, are forward-looking statements within the safe harbor provisions of the Private Securities Litigation Reform Act of 1995. Such statements are based on current expectations only and are subject to certain risks, uncertainties, and assumptions, including, but not limited to, changes in semiconductor industry growth (including, without limitation, wafer starts) or ATMI's markets; competition, problems, or delays developing and commercializing new products; problems or delays in integrating acquired operations and businesses; and other factors described in ATMI's filings with the Securities and Exchange Commission. Such risks and uncertainties may cause actual results to differ materially from those expressed in our forward-looking statements. ATMI undertakes no obligation to update any forward-looking statements.

SABRE Extreme is a trademark of Novellus Systems, Inc.



            

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