CHASKA, Minn., July 16, 2007 (PRIME NEWSWIRE) -- Today at SEMICON West, Entegris, Inc. (Nasdaq:ENTG) announced that it has added the RSPX Manual Purge Station to its Clarilite Certified solution for preventing reticle haze. The addition of the RSPX station to the Clarilite solution gives manufacturers greater protection against reticle haze by purging the reticle pod as it waits for the next process step.
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Entegris introduced the Clarilite system earlier this year as the first comprehensive solution to help semiconductor manufacturers address the quality and cost issues associated with reticle haze in 193nm lithography. The system is comprised of Entegris products that have been tested and certified based on their ability to help reduce reticle haze and extend reticle life in fabs, thereby reducing the need for frequent cleaning.
Reticle haze is formed from airborne contaminants and moisture in the reticle environment. To prevent haze, reticles must continuously reside in an extremely clean and dry environment from the moment they arrive at the production fab. The Clarilite Certified system provides a continuous cleansing environment for the reticle using purified gas.
With a capacity to hold up to ten pods with phase shift masks, the RSPX Manual Purge Station is RFID-capable and can operate as a stand-alone unit with integrated purge.
"The cost of reticle defects caused by haze can be exorbitant, and it's an acute problem in fabs with deep ultraviolet lithography tools," said Bill Shaner, president and general manager, Entegris Microenvironments business. "The Clarilite Certified system leverages Entegris' contamination control expertise to help manufacturers control these costs, and the RSPX station is an important new addition to that solution."
For more information on the RSPX Manual Purge Station, please visit the Entegris exhibit #1020 at the SEMICON West show, July 17-19, in San Francisco.
ABOUT ENTEGRIS
Entegris is the global leader in materials integrity management, delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.
Entegris, XCDA, Clarilite and Clarilite Certified are registered trademarks of Entegris, Inc.
The photo is also available via AP PhotoExpress.
