CHASKA, Minn., July 17, 2007 (PRIME NEWSWIRE) -- Today at SEMICON West, Entegris, Inc. (Nasdaq:ENTG) introduced the NT(r) 8800 Conductivity Sensor, a high-purity flow-through conductivity sensor that allows semiconductor manufacturers to accurately measure and repeatedly produce reliable chemical blends. The NT 8800 is ideally suited for processes that require completely non-metallic wetted material, such as measuring and monitoring the concentration of HF blends from concentrated to ultra-high dilution. Leveraging the already proven high performance and reliability of the Entegris family of NT flow controllers and sensing equipment, the NT 8800 also will help manufacturers lower their cost of ownership by allowing more effective chemical control.
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"Repeatable and accurate chemical blends translate into increased yields, optimized chemical consumption and fewer wafer defects during wet etch, CMP delivery and on-demand chemical blending applications," said Todd Edlund, general manager and vice president of the Entegris Liquid Systems business. "The NT 8800 Conductivity Sensor allows Entegris customers to optimize their chemical consumption, ensure process integrity in their applications and significantly increase their yields."
The NT 8800 wetted flowpath is made of 100 percent perfluoroalkoxy polymer resin and is compatible with aggressive chemistries up to 140 degrees C. It features Entegris' PureBond(r) welding technology, which eliminates the need for O-rings or gaskets. Contact your regional customer service center for ordering information.
For more information on the NT 8800, please visit the Entegris exhibit No. 1020 at the SEMICON West show, July 17-19, in San Francisco.
ABOUT ENTEGRIS
Entegris is the global leader in materials integrity management, delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.
Entegris, NT and PureBond are registered trademarks of Entegris, Inc.
The photo is also available via AP PhotoExpress.
