SAN FRANCISCO, July 15, 2008 (PRIME NEWSWIRE) -- Entegris, Inc. (Nasdaq:ENTG) today introduced new additions to its Torrento(tm) and Impact(r) families of liquid filters at the SEMICON West 2008 trade show in San Francisco, July 15-17. The filters set a new standard in the reduction of wafer defects in advanced photolithography and wet etch and clean applications by controlling nano-scale contamination in the manufacturing of advanced, sub-45 nanometer semiconductor devices.
Designed for use in advanced wet etch and clean manufacturing processes, the new Torrento ATE 15nm chemical filter combines the unsurpassed retention of particles as small as 15nm with the industry's leading flow rate at the specified retention rating. Built on the first and only 15nm PTFE membrane on the market, the Torrento filter features low pressure drop and Entegris' proprietary, non-dewetting surface modification that provides for stable, long-life performance. It is ideal for use with aggressive SPM, SC1 and SC2 chemistries.
Entegris' new Impact filter is the industry's first 5nm filter for point-of-use photochemical applications, offering the tightest retention of hard particles and gels available in the industry today. The Impact filter features an asymmetric membrane that delivers an effective combination of improved flow rates and lower pressure drop to handle the most advanced photoresists and other coatings. The 5nm asymmetric membrane technology is also available for bulk photochemical applications in the Microgard(tm) family of filters.
"Entegris is committed to using advanced materials science expertise to deliver industry-leading contamination control solutions to the semiconductor and microelectronics industry," said Todd Edlund, vice president and general manager, Contamination Control, Entegris. "Leveraging our membrane science and process expertise, these new filters from Entegris are designed to help drive our customers toward higher productivity and performance in sub-45nm processes."
For more information, visit Entegris at SEMICON West 2008, booth 1021 in the South Hall of the Moscone Center.
About Entegris
Entegris is a leading provider of a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in the semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, India, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.
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Impact is a registered trademark. Torrento and Microgard are trademarks of Entegris, Inc.