SAN FRANCISCO, July 16, 2008 (PRIME NEWSWIRE) -- The IntelliGen(r) HV, a new precision dispense system offered by Entegris, Inc. (Nasdaq:ENTG), provides rapid filter changeout as well as reliable dispense of high-viscosity chemistries used in semiconductor manufacturing. Entegris introduced its new dispense system, the IntelliGen(r) HV, at the SEMICON West 2008 trade show held in San Francisco on July 15-17.
IntelliGen HV leverages the compact design and filter Connectology(r) of the company's highly successful IntelliGen Mini, and enables users to rapidly and safely change filters. In addition, the IntelliGen HV provides cost-saving and performance features, including automatic adjustment for viscosity and filter loading, and dispense confirmation to detect coating issues and prevent scrap.
The IntelliGen HV uses the Company's two-stage technology, which enables filtration to occur at a rate independent of the dispense system, which allows for precise, repeatable dispense of difficult-to-handle viscous fluids such as polymides and thick resists. The unit also features a network interface capability for ultimate process control and yield enhancement
"This new high viscosity pump not only eliminates the mess of filter changeouts, but it is quicker, smarter, safer and easier to use for our customers," said Todd Edlund, vice president and general manager, Contamination Control, Entegris. "It's an example of our ability to positively impact fab productivity and, at the same time, meet the needs of new processes and technologies."
For more information, visit Entegris in booth 1021 in the Moscone Center South Hall at SEMICON West 2008.
About Entegris
Entegris is a leading provider of a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in the semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, India, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.
IntelliGen and Connectology are registered trademarks of Entegris, Inc.
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