Source: EQS Group AG
DGAP-News: SUSS MicroTec launches the new Mask Aligner MA12
DGAP-News: SÃSS MicroTec AG / Key word(s): Product Launch
SUSS MicroTec launches the new Mask Aligner MA12
29.04.2014 / 09:51
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PRESS RELEASE
SUSS MicroTec launches the new Mask Aligner MA12
Garching, April 29, 2014 - SUSS MicroTec, a global supplier of equipment
and process solutions for the semiconductor industry and related markets,
has launched the Mask Aligner MA12 today.
This semi-automated tool is designed for industrial research and production
of wafers up to 300 mm and 300x300 mm square substrates. It represents the
latest mask aligner technology in terms of accuracy, optical performance
and versatility. The operator assisted MA12 offers highest process
flexibility including submicron alignment and features the MO Exposure
Optics of SUSS MicroTec, a unique illumination optics, adjustable to meet
various exposure requirements.
The newly-introduced mask aligner addresses the Advanced Packaging market
including 3D wafer-level chip scale packaging (3D WLCSP) and wafer-level
packaging (WLP) as well as the MEMS market. The SUSS MicroTec MA12 combines
the advantages of a reliable manual tool specialized on the handling of
delicate substrates, such as highly warped wafers and fragile substrates,
with the performance of a state-of-the art 300 mm lithography tool.
Processes developed on the MA12 can be quickly transferred onto the
automated SUSS MicroTec high volume production platform.
"The MA12 has been designed to enable quick and effective development of
new products and process technologies", explains Frank P. Averdung,
president and CEO of SUSS MicroTec. "Research organizations will benefit
from the enhanced capabilities of the industry-compatible MA12 as it offers
the flexibility needed in the development and adoption of latest
lithography processes."
About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for
microstructuring in the semiconductor industry and related markets. In
close cooperation with research institutes and industry partners SUSS
MicroTec contributes to the advancement of next-generation technologies
such as 3D Integration and nanoimprint lithography as well as key processes
for MEMS and LED manufacturing. With a global infrastructure for
applications and service SUSS MicroTec supports more than 8.000 installed
systems worldwide. SUSS MicroTec is headquartered in Garching near Munich,
Germany. For more information, please visit http://www.suss.com
Contact:
SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
Email: franka.schielke@suss.com
End of Corporate News
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Language: English
Company: SÃSS MicroTec AG
Schleissheimer Strasse 90
85748 Garching
Germany
Phone: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
E-mail: ir@suss.com
Internet: www.suss.com
ISIN: DE000A1K0235
WKN: A1K023
Listed: Regulierter Markt in Frankfurt (Prime Standard);
Freiverkehr in Berlin, Düsseldorf, Hamburg, München,
Stuttgart
End of News DGAP News-Service
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