Lam Research’s selective etch portfolio provides a powerful advantage in the design and manufacture of advanced logic and memory semiconductor solutions. Prevos™ and Selis® (pictured) can be delivered as a single, integrated tool to provide unique multi-layer selective etching, improved queue-time control, and maximum production flexibility.
Lam Research’s selective etch portfolio provides a powerful advantage in the design and manufacture of advanced logic and memory semiconductor solutions. Prevos™ and Selis® (pictured) can be delivered as a single, integrated tool to provide unique multi-layer selective etching, improved queue-time control, and maximum production flexibility.