Applied Materials' Endura® Impulse™ PVD platform for PCRAM and ReRAM includes up to nine process chambers integrated under vacuum along with on-board metrology to allow the precise deposition and control of the multi-component materials used in these emerging memories.
Applied Materials' Endura® Impulse™ PVD platform for PCRAM and ReRAM includes up to nine process chambers integrated under vacuum along with on-board metrology to allow the precise deposition and control of the multi-component materials used in these emerging memories.