BILTHOVEN, The Netherlands - December 2, 2005 - ASM International N.V. (Nasdaq: ASMI and Euronext Stock Exchange in Amsterdam: ASM) today reported that CEA Leti recently qualified the 300 mm Levitor® 4300 RTP system that was shipped to Grenoble. At CEA Leti, the Levitor® 4300 will be used in various advanced programs, including Ultra-Shallow Junction formation (spike anneals), Nickel silicidation, and annealing of High-k films. It is expected that this advanced 300mm RTP system will be a cornerstone of the CEA Leti Nanotec 300 program.
Olivier Demolliens, in charge of Nanotec 300 at CEA Leti stated: "This is an important milestone in completing the Nanotec 300 pilot-line facility. CEA Leti has worked with ASM for several years on RTP programs, and as such is very pleased with the 300mm system performance. This system is unique because of conductive heating, reducing pattern effects for CMOS devices of 45nm and beyond ".
Jaap Beijersbergen, Business Unit Manager of the Levitor® Product Line commented: "We are very pleased with the CEA Leti team selection of the Levitor® 4300. ASM's Levitor, with its novel conduction rather than radiation heating technology, has been proven to have unmatched insensitivity to emissivity variations and unparalled inherent uniformity and repeatability. We look forward to working with the CEA Leti team on critical RTP technology for 45nm devices and beyond".
About ASM International
ASM International N.V. and its subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. The company provides production solutions for wafer processing (Front-end segment) as well as assembly and packaging (Back-end segment) through facilities in the United States, Europe, Japan and Asia. ASM International's common stock trades on NASDAQ (symbol ASMI) and the Euronext Amsterdam Stock Exchange (symbol ASM). For more information, visit ASMI's web site at www.asm.com.
About CEA Leti
The CEA plays a major role in research, development and innovation in three main fields: energy, information and healthcare technologies, and defence. Set up on 9 centres located all over France, the CEA benefits from a strong regional insertion and solid partnerships with other research organisations, local authorities and universities. More on www.cea.fr
A laboratory of the CEA in Grenoble, the Laboratory of electronics and information technologies (Leti) is at the leading edge of European research on microelectronics and micro-nanotechnologies. CEA Leti employs more than 900 people. With its 110 patents filed per year and its twenty-eight start-ups created or in the course of creation, it is one of the major partners of the industrial world. More on www-leti.cea.fr
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