DGAP-News: AIXTRON SE / Key word(s): Product Launch
CRIUS(R) II-XL: World's most productive MOCVD reactor launched by
AIXTRON
08.11.2011 / 06:58
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CRIUS(R) II-XL: World's most productive MOCVD reactor launched by AIXTRON
Aachen/Germany, November 8, 2011 - After the successful introduction of
CRIUS(R) II-L, AIXTRON SE (FSE: AIX; NASDAQ: AIXG) is proud to announce the
next milestone in terms of MOCVD reactor productivity. The novel CRIUS(R)
II-XL configuration offers an outstanding reactor capacity as high as 19x4
inch, thus providing the world's highest throughput and productivity.
Additionally, CRIUS(R) II-XL provides best-in-class cost of ownership and
footprint efficiency.
CRIUS(R) II-XL builds on the hardware setup of CRIUS(R) II-L. 'The only
part that needs to be exchanged is the susceptor plate, which means that
the larger capacity comes with virtually no extra cost', states Dr.
Johannes Lindner, AIXTRON's program manager for Close Coupled Showerhead(R)
(CCS) reactor technology. 'This was one of the key design criteria in order
to make the transition from CRIUS(R) II-L to CRIUS(R) II-XL as smooth as
possible. Furthermore, only very minor process tuning factors need to be
applied to transfer processes to CRIUS(R) II-XL.'
This latest version of the CRIUS(R) reactor family is again a result of a
detailed analysis of market requirements, in particular with respect to LED
manufacturing cost. 'There is a strong need for cost-efficient LED
manufacturing, and we know how much MOCVD can contribute to this cost
reduction', says Dr. Rainer Beccard, Vice President of Marketing at
AIXTRON. 'Amongst many parameters, it is the reactor capacity which has the
biggest impact on the total cost of ownership. Thus we have decided to
design a 19x4 inch setup. This configuration has been extensively tested in
AIXTRON's application lab, making sure it provides perfect uniformity and
yield together with its impressive capacity. The system is optimized for
wafer sizes between 2 inch and 8 inch; changing from one wafer size to
another requires a simple carrier plate exchange without further hardware
or process adjustment.'
CRIUS(R) II-XL is the latest addition to AIXTRON's CCS product line, which
has proven to provide ultimate process stability and robust operation
through many years. Standard features of this MOCVD system include an
in-situ reactor height adjustment, allowing to choose optimum reactor
geometries for any process regime, and the unique ARGUS in-situ monitoring
device.
For further information on AIXTRON (FSE: AIXA, ISIN DE000A0WMPJ6; NASDAQ:
AIXG, ISIN US0096061041) please consult our website at: www.aixtron.com.
Contact:
Investor Relations and Corporate Communications
AIXTRON SE, Kaiserstr. 98, 52134 Herzogenrath, Germany
Phone: +49 241 8909 444, Fax: +49 241 8909 445, invest@aixtron.com
www.aixtron.com
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Language: English
Company: AIXTRON SE
Kaiserstr. 98
52134 Herzogenrath
Germany
Phone: +49 (241) 8909-444
Fax: +49 (241) 8909-445
E-mail: invest@aixtron.com
Internet: www.aixtron.com
ISIN: DE000A0WMPJ6, US0096061041
WKN: A0WMPJ
Listed: Regulierter Markt in Frankfurt (Prime Standard);
Freiverkehr in Berlin, Düsseldorf, München, Stuttgart;
Terminbörse EUREX
End of News DGAP News-Service
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145107 08.11.2011
DGAP-News: CRIUS(R) II-XL: World's most productive MOCVD reactor launched by AIXTRON
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