IHP selects ASM’s epsilon for silicon germanium


BILTHOVEN, The Netherlands, November 14, 2000 – ASM INTERNATIONAL NV (Nasdaq: ASMI and AEX: ASM) announced today that its subsidiary, ASM America, has delivered and installed an EpsilonTM E2000TM single wafer epitaxial reactor at IHP's new 0.25-micron processing facility in Frankfort (Oder), Germany. This order underlines ASM’s leading position in the world of advanced Silicon Germanium (SiGe) applications.

IHP, INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS, a leading European development center for semiconductor technology, will use the Epsilon primarily for prototyping and further development of its proprietary high performance SiGe:C process technology in a variety of semiconductor devices for wireless and broadband applications. IHP has introduced a world-leading SiGe:C heterojunction bipolar transistor (HBT) module for integration into state-of-the-art CMOS production processes. The benefits of this BiCMOS technology include significantly higher speeds at lower power drain in a more reliable product chip. This technology is ideally suited for the burgeoning wireless and broadband communication markets.

Dr. Armand P. Ferro, ASM Epitaxial Business Unit Manager, stated: " The IHP SiGe:C HBT processes require a tool, which can reliably maintain precise control over a very wide range of multiple epitaxial parameters in a production environment. The Epsilon has been the single-wafer reactor of choice for the majority of the semiconductor device manufacturers and it currently accounts for approximately 75-percent of the installed base for SiGe processing. We are proud that IHP has selected the Epsilon for advancement of this new technology, which will impact future telecommunication applications."

IHP focuses on innovations in wireless and broadband applications, with core competencies in process technology, RF circuit design, and systems. IHP has a customer base of over 30 semiconductor manufacturers and design houses. Its ultra modern facilities and innovation culture make IHP one of the leading research and development institutions for chips technology in the world. More information on IHP can be found on its website at http://www.ihp-microelectronics.

ASM is a world-class supplier of single-wafer epitaxial tools and related semiconductor process equipment. ASM has been building and selling epitaxial reactors since 1987 and its Epsilon reactors are used in mass production by all major semiconductor device manufacturers and wafer suppliers worldwide.

About ASM


ASM International is headquartered in Bilthoven, the Netherlands. ASM International's subsidiaries design, develop, manufacture and market equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for the wafer-processing, assembly and packaging segments through their facilities in the United States, Europe, Japan and Asia. ASM International's common shares trade on NASDAQ National Market under the symbol “ASMI” and on the AEX Stock Exchange under the symbol "ASM". More information on ASM can be found on its website at http://www.asm.com

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