ASM receives outstanding vendor award from umc semiconductor for pecvd tool


BILTHOVEN, The Netherlands, (November 15, 2000) - ASM INTERNATIONAL N.V (Nasdaq: ASMI and AEX: ASM) announced that its subsidiary ASM Japan K.K. has received the 2000 ¡§Outstanding Vendor Award¡¨ from UMC in Taiwan based upon the performance of the Eagle 10„§ Trident„§, ASM¡¦s single-wafer, plasma enhanced chemical vapor deposition (PECVD) tool.

UMC, one of the world¡¦s largest semiconductor foundries, annually awards an ¡§Outstanding Vendor Award¡¨ to those vendors who have provided tools with the highest performance, lowest service requirements and best innovations. For 2000, it was the performance of the Eagle 10 Trident that allowed ASM to receive the award. The award was presented to Fukumi Tomino, Managing Director of ASM Japan, and to John Chang, General Manager of ASM Taiwan. Roger Chung, Purchasing Division Director, presented the award on behalf of UMC.

¡§We are very proud to have been selected by UMC to receive this prestigious award¡¨, stated Daniel Queyssac, President and COO of Front-end businesses. ¡§With three process chambers, the Eagle 10 Trident is the industry¡¦s most versatile PECVD tool in terms of process flexibility. It can perform all of today¡¦s leading-edge processes including the Aurora low-k sequence (with a k-value of 2.7) and SiC for Copper damascene structures, high temperature SiN for SAC, SiN, SiOF (with a k-value of 3.8), ARC-SiON and more. Additionally, the Eagle 10 Trident combines high throughput and high uptimes with the lowest consumables use of any PECVD tool.¡¨ continued Queyssac.

About ASM


ASM International is headquartered in Bilthoven, the Netherlands, ASM International¡¦s subsidiaries design, develop, manufacture and market equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for the wafer processing, assembly and packaging segments through their facilities in the United States, Europe, Japan and Asia. ASM International¡¦s common shares trade on NASDAQ National Market under the symbol ¡§ASMI¡¨ and on the AEX Stock Exchange under the symbol ¡§ASM¡¨. More information on ASM can be found on its website at http://www.asm.com

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