The orders for the Polygon systems are from two major Japanese semiconductor manufacturers and are valued at several million dollars. The systems include ASM's Pulsar® 2000 Atomic Layer CVD(TM) (ALCVD(TM)) modules and will be used for development and production qualification of advanced 100nm and 70nm CMOS logic devices. ASM has scheduled deliveries of the tools for December 2001, and January 2002, respectively.
"It is evident that despite the current harsh business climate, there still is room for significant technology buys. Tools offering enabling technologies like our Polygon benefit from this," said Dr. Henk de Waard, thin film products business unit manager at ASM. "Furthermore, these orders underscore the rapid market acceptance of our Polygon cluster tool. The roll-out of our ALCVD technology remains on track."
The Polygon8200 is a versatile single-wafer cluster tool with a suite of process modules that offer a broad range of process capabilities in support of advanced 100nm and 70nm device applications, such as gate-stack formation, gate-electrodes, storage and decoupling capacitors. Process capabilities include amorphous and polysilicon, silicon-germanium, silicon-nitride, and ALCVD processes for atomic layer deposition of dielectric materials such as aluminum-oxide (Al2O3), hafnium-oxide (HfO2) and their mixtures. ASM also manufactures the Polygon 8300 for 300mm wafer processing.
About ASM
ASM International N.V. is headquartered in Bilthoven, the Netherlands. ASM International is a global company, serving one of the most important and demanding industries in the world. The Company possesses a strong technological base, state-of-the-art manufacturing facilities, a
competent and qualified workforce and a highly trained, strategically distributed support network. ASM International's subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing, assembly and packaging through their facilities in the United States, Europe, Japan and Asia. ASM International's common stock shares trade on Nasdaq (symbol ASMI) and the Euronext Stock Exchange in Amsterdam (symbol ASM). For more information, visit ASM's Web site at http://www.asm.com
# # #
Safe Harbor Statement under the US Private Securities Litigation Reform Act of 1995: The statements regarding orders, earnings development and the effects of research and new products on ASM's future, and other matters discussed in this statement, except for any historical data, are forward-looking statements. Forward-looking statements involve risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements. These include, but are not limited to economic conditions in the semiconductor industry, currency fluctuations, the timing of significant orders, market acceptance of new products, competitive factors, risk factors related to litigation and other risks indicated in filings from time to time with the SEC and Stock Exchange Authorities.