FormFactor's FRT MicroProf® PT panel metrology and inspection system for advanced semiconductor packaging. With full automation and hybrid metrology capabilities, a single system can perform multiple types of 3D measurements and defect detection on the large format panels -- up to 600mm x 600 mm.
FormFactor's FRT MicroProf® PT panel metrology and inspection system for advanced semiconductor packaging. With full automation and hybrid metrology capabilities, a single system can perform multiple types of 3D measurements and defect detection on the large format panels -- up to 600mm x 600 mm.