ASMI completes volume purchase agreement with ATMI


BILTHOVEN, THE NETHERLANDS, October 5, 2000 - ASM International N.V. (Nasdaq: ASMI and AEX: ASM), announced today that its subsidiary, ASM America, has completed a volume purchase agreement with ATMI, Inc. (Nasdaq: ATMI) for the delivery of multiple EpsilonÔ single wafer epitaxial reactor systems over the next twelve months. The Epsilon reactors will provide capacity expansion of silicon epitaxy production at ATMI's Epitaxial Services, the world's largest independent specialty epitaxial foundry.

Phil Yin, President of ATMI's Epitaxial Services, said, ``We are pleased to have the support of ASMI and its production proven Epsilon reactors. The purchase of these reactors will enable our expansion in epitaxial production and allow us to maintain our position as a world-leading foundry for specialty silicon epitaxy."

Dr. Armand P. Ferro, ASMI Epitaxial Business Unit Manager, added: "We are pleased to be selected by ATMI, Epitaxial Services for the production expansion of their factory, which already maintains the largest installed base of ASM Epsilon reactors in the world. The robust nature and the flexible, wide range process capability of the Epsilon reactor make it the preferred low-cost choice for epitaxial service businesses."

ASM is a world-class supplier of single-wafer epitaxial tools and related semiconductor process equipment. ASM has been building and selling epitaxial reactors since 1987 and its Epsilon reactors are used in mass production by all major semiconductor device manufacturers and wafer suppliers worldwide.

ATMI provides specialty materials and related equipment and services to the worldwide semiconductor industry. Related equipment includes materials packaging systems, delivery systems, sensors, and a full line of environmental equipment. Services include materials management, equipment servicing, and thin film deposition.

About ASM


ASM International is headquartered in Bilthoven, the Netherlands. ASM International's subsidiaries design, develop, manufacture and market equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for the wafer processing, assembly and packaging segments of the semiconductor equipment market through their facilities in the United States, Europe, Japan and Asia. ASM International's common shares trade on the NASDAQ National Market and on the AEX Stock Exchange in Amsterdam under the symbol "ASM". More information on ASM can be found on its website at http://www.asm.com

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