BILTHOVEN, The Netherlands, Dec. 16, 2002 (PRIMEZONE) -- ASM International N.V. (Nasdaq:ASMI) (Amsterdam:ASM) and its subsidiary, ASM Japan, announced today its Dragon[TM] 2300 PECVD tool is now ready for high-volume manufacturing (HVM). The Dragon has the smallest footprint of any PECVD tool for HVM.
ASM's compact Dragon 300mm PECVD tool demonstrates high wafer throughput and highest uptime. High throughput is achieved with the Dragon's symmetric process on dual reactors, while the independent process control remains at each reactor to achieve the best process performance. In addition, the unique modules concept allows for ease of maintenance and higher uptime.
The Dragon's small footprint allows for easier design into 300mm fab layouts. With a simplified design, the Dragon enables short lead timefor manufacturing and installation. Furthermore, the Dragon maintains low energy consumption and lowest CoO performance.
"ASM's Dragon tool addresses the critical factors of importance to customers in 300mm wafer processing," said Tominori Yoshida, ASM's business unit manager for PECVD and low-k. "With the Dragon ready forhigh-volume manufacturing, ASM is further positioned as a leader inPECVD."
"ASM's progress in PECVD demonstrates our unique leadership in providing customers with the most advanced technology solutions to meet their next-generation chip manufacturing requirements," said Daniel Queyssac, president and COO of ASM Front-End Operations. "Our dedication to establishing ground-breaking processes and products that serve the needs of 300mm wafer processing customers reinforces our commitment to the process of innovation."
Process applications for the Dragon 2300 include conventional TEOS, Silane based process and SiC hardmask and low-k films including Aurora(TM) 2.7 and Aurora(TM) 2.4.
About ASM
ASM International N.V. is headquartered in Bilthoven, the Netherlands. ASM International is a global company, serving one of the most important and demanding industries in the world. The Company possesses a strong technological base, state-of-the-art manufacturing facilities, a competent and qualified workforce and a highly trained, strategically distributed support network. ASM International's subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing, assembly and packaging through their facilities in the United States, Europe, Japan and Asia. ASM International's common stock shares trade on NASDAQ (symbol ASMI) and the Euronext Stock Exchange in Amsterdam(symbol ASM). For more information, visit ASM's Web site at http://www.asm.com
Safe Harbor Statement under the U.S. Private Securities LitigationReform Act of 1995: The statements regarding orders, earningsdevelopment and the effects of research and new products on ASM'sfuture, and other matters discussed in this statement, except for anyhistorical data, are forward-looking statements. Forward-lookingstatements involve risks and uncertainties that could cause actualresults to differ materially from those in the forward-lookingstatements. These include, but are not limited to economic conditionsin the semiconductor industry, currency fluctuations, the timing ofsignificant orders, market acceptance of new products, competitivefactors, risk factors related to litigation and other risks indicatedin filings from time to time with the SEC and Stock ExchangeAuthorities.
ASM is a registered trademark, and Dragon and Aurora are trademarks of ASM International.