CHELMSFORD, Mass., Aug. 27, 2012 (GLOBE NEWSWIRE) -- Brooks Automation, Inc. (Nasdaq:BRKS) announces the release of the Granville-Phillips 835 Vacuum Quality MonitorTM (VQMTM) and the 835 VQM Differential Pump System (DPS). The 835 VQM builds on the award winning 830 VQM with multiple customer-requested features and an expanded 1-300 amu measurement range. The 835 VQM DPS allows for operation and process control in semiconductor, coating and other higher pressure applications by allowing operation up to 3 Torr.
Interfacing to the VQM software is easy with the new API (Application Programmers Interface) that can be linked with users programs to provide complete control over the VQM and allow reading of gas composition data. There is also a new VQI (Vacuum Quality Index) function where users can enter an equation which drives a digital output, an audible alarm, or the start of data logging. As an example, being able to start a process when total pressure is low enough, the water level has decreased beyond a certain level, and the reactive gas level is equal to a specified amount is highly desired by many customers.
Measurement sensitivity is greatly increased with the 835 VQM through numerous features including a larger A/D, improved electrometer, lower noise, and software data analysis improvements. The 835 VQM makes maintenance simple by providing a field replaceable electron multiplier to go along with the field replaceable filament making all consumables field replaceable.
The 835 VQM DPS provides real-time information that can be used to optimize PVD, implant, coating and other vacuum processes to increase productivity, improve results, and save money. Since most processes occur in a higher vacuum level (typically in the mTorr range), differential pumping is required to reduce the process chamber pressure to the operating range of the VQM (below 1E-5 Torr). The 835 VQM DPS has a gate valve with an orifice. During base out, the gate valve is open providing the VQM with a high conductance path directly to the process chamber for greater sensitivity and accuracy. During process, the gate valve is closed and a turbo pump is used to reduce pressure through the limited conductance of the orifice. The valve can be manually or pneumatically controlled.
"Customers that have been asking for extended mass range, process control outputs and operation at higher pressures, can now benefit from the VQM ion trap technology," said Joergen Olsson, GM of Brooks Automation's Instrumentation Group. "The wait is over for those wanting to utilize the speed, simple calibration, and ease of use advantages of the VQM for their applications."
The 835 VQM and 835 VQM DPS systems are available now. The 835 VQM consists of an ion trap mass spectrometer gauge, a VQM Controller and VQM Viewer software and the 835 VQM DPS adds a gate valve with orifice, turbo pump, roughing pump, and 390 Micro-Ion® ATM total pressure gauge.
For more information go to www.brooks.com/vqm or email vqm@brooks.com.
About Brooks Automation, Inc.
Brooks is a leading worldwide provider of automation, vacuum and instrumentation solutions for multiple markets including semiconductor manufacturing, life sciences, and clean energy. Our technologies, engineering competencies and global service capabilities provide customers speed to market, and ensure high uptime and rapid response, which equate to superior value in their mission-critical controlled environments. Since 1978, we have been a leading partner to the global semiconductor manufacturing market and through product development initiatives and strategic business acquisitions; we have expanded our reach to meet the needs of customers in the life sciences industry, analytical & research markets and clean energy solutions. Brooks is headquartered in Chelmsford, MA, with direct operations in North America, Europe and Asia. For more information, please visit www.brooks.com.