SPARKS, NV--(Marketwired - Jun 1, 2016) - Reno Sub-Systems, a developer of high-performance radio frequency (RF) matching networks, RF power generators and gas flow management systems for semiconductor manufacturing, today announced it has closed its Series B funding round of $14 million led by MKS Instruments.

"Reno has made tremendous strides in terms of technology development since completing our Series A funding in late 2014," said Bob MacKnight, CEO of Reno Sub-Systems. "We're now at the point where our technology is demonstrating unprecedented performance and seeing strong interest from leading IDMs and OEMs. This funding is critical in terms of allowing us to win more platforms and move into high-volume manufacturing to cover demand."

Plasma processing is a critical technology in the fabrication of advanced microelectronic circuits. To create the next generation of advanced devices (sub-14nm), highly repeatable, precisely controlled, short-time cycle plasma etching and deposition are essential. Plasma processing environments are characterized by precise gas flows, rapid RF matching and vacuum control.

Reno Sub-Systems' enabling technologies open the plasma processing door to deep submicron feature sizes and the very short process times necessary for both planar and 3D device architectures. In addition to new process regimes, Reno Sub-Systems' technologies facilitate "always on" plasma management, fast gas transitions and extremely low-flow management, reducing on-wafer particles, improving film properties and reducing cost per transistor, according to Moore's law.

About Reno Sub-Systems
Reno Sub-Systems Inc. has developed new and disruptive technologies for the semiconductor and advanced microelectronic industries. Leveraging its patented technologies, Reno has demonstrated the highest performance radio frequency (RF) matching networks, RF power generators and gas delivery systems for leading-edge nanoscale manufacturing processes. Reno has generated strong customer demand based on on-tool performance data, which has allowed the company to transition from technology and product development to high-volume adoption within two years. For more information, please visit

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Chris Davis
+ 1 972-658-0985

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